iMOXS is a brilliant low power X-ray source for various applications in the X-ray fluorescence analysis (iMOXS-MFR) and in the X-ray diffraktion (iMOXS-XRD). iMOXS-SEM is a special implementation of the iMOXS-MFR for mounting to a scanning electron microscope (SEM).

With iMOXS a modular construction principle has been realised. X-ray optics as well as X-ray tube are interchangeable and can be optimally adapted for the special application. The X-ray tube operates with the control and supply unit CSU.