iMOXS-SEM is a special iMOXS-MFR design for the attachment to a scanning electron microscope (SEM). With iMOXS-SEM X-ray fluorescence spectra can be measured with the existing energy dispersive X-ray spectrometer. This enables to exploit the high elemental sensitivity of X-ray fluorescence analysis (XRF) in comparison with electron probe microanalysis (EPMA). iMOXS-SEM is compatible to all existing EDX-systems on the market. For quantitative analysis the measured spectra have to be exported in the EMSA/MAS format to the software iMOXS-Quant. XRF mapping can be performed presupposed the EDX-system has the option for microscope stage control.